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Business unit / dept.: Metal Deposition Solutions

Y2O3 99.99% 1.0-3.0mm 500g - 0700996-00500G

Y2O3 99.99% 1.0-3.0mm 500g - 0700996-00500G

Specifications

Coating material

Yttrium oxide

Purity

99.99%

Form

Tablet

Dimensions

1.0 - 3.0 mm

Quantity

500 g

Theoretical density at 20°C in g/cm³

5.0

Melting point in °C

2410

Temperature at vapor pressure

10⁻² mbar in °C

~ 2300

10⁻¹ mbar in °C

~ 2700

Boiling point in °C

4300-4440

Type of evaporation

Melting

Possible

Sublimation

Possible

Evaporation source (typically)

E-gun

Liner material

W

Good

Boat

Boat material

W

Possible

Mo

Good

Specific evaporation conditions

Preparation of base melt (premelt)

Possible

Reactive gas pressure

Good

Substrate temperature range

100 - 200 °C

Good

200 - 300 °C

Good

Film transparency

Low

< 0.25

High

10-12

Film refractive index n / extinction coefficient k

at 550 nm: n

1.78-1.87

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