Sputtering Targets
Über Sputtering Targets
Umicore ist ein führender Hersteller von Sputter Targets für PVD-Anwendungen in diversen Branchen.
Sputter Targets können für viele verschiedene Anlagenhersteller wie Evatec, Applied Materials, SPTS, Ulvac und viele weitere hergestellt werden. Eine Auswahl unserer Targetmaterialien ist oben mit der jeweiligen Standardreinheit aufgeführt.
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NiSi4,5 |
3N5 |
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Metals |
Alloys |
Precious metals |
Non-metals |
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Al |
5N, 5N5 |
AlCu0.5 |
5N5 |
Ag |
4N |
Al2O3 |
4N |
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Cr |
3N5 |
AlCu4 |
5N5 |
Au |
4N |
Ge |
5N |
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Cu |
4N5 |
AlSi0.5 |
5N5 |
AuZn3 |
4N |
ITO (IN2O3/SNO2) 90/10, 97/3 |
4N |
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Hf |
3N7 |
AlSi1 |
5N5 |
Pt |
3N5, 4N |
NbO2 |
3N5 |
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In |
4N |
AlSi1Cu0.5 |
5N5 |
Pd |
3N5, 4N |
Nb2O5 |
3N |
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Mo |
3N5 |
CrNi30 |
3N |
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Si |
5N, 6N |
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Nb |
3N |
CrNi40 |
3N |
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SiO2 |
4N |
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Ni |
3N5 |
CrNi50 |
3N |
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GaZO (ZNO/GA2O3) |
3N |
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Sn |
4N5 |
MoSi2 |
2N |
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Ta |
3N, 3N5, 4N |
NiCr20 |
3N |
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Ti |
3N, 4N5 |
NiFe18 |
3N |
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W |
3N5, 5N |
NiFe19 |
3N |
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Zn |
3N |
NiFe21.5 |
3N |
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Zr |
2N2 |
NiFe55 |
3N |
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NiV7 |
3N5 |
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WTi |
4N5 |
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AlSc |
3N5 |
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